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Product Information

Wafer Marking System

Wafer Marking System

Small footprint.

  • Feature
  • Specification

Specifications

Wafer size

4, 5, 6, 8 inch, and 12 inch*
Marking Soft / hard marking
Marking positioning accuracy +/- 200µm (Option: +/- 75µm)
Takt time 150WPH (5x9 dots, 12 letters)

*For 12 inch (Two cassettes FOUP)