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WL-CSP Marking System

WL-CSP Marking System

LD-pumped fiber-coupling SHG laser marker with air cooling.

  • Feature
  • Specification

Specifications

Model MS-WL-6891 (for 6 to 8 inch), MS-WL-8291 (for 8 to 12 inch)
Dimensions and weight 2200W x 1763D x 1800H mm  / 1600kg
Wafer size 12 inch: FOUP x1
8 inch: Full automation (Open cassette) x1
6 inch: Semi automation (Manually set to a table)
Thickness 0.3 to 2mm
Marking check Automation (Black/white)
Marking positioning accuracy Within +/- 50µm
Marking White / black marking